KMS Membranes For Microelectronic Applications

In order to achieve both the high quality and the consistent quantity of water needed for the fabrication of today's extremely compact semiconductor chips, KMS ultrafiltration membranes and reverse osmosis elements are an ideal combination.

KMS ultrafiltration membranes are an attractive alternative to conventional chemical and mechanical filtration. They provide a more effective and reliable pretreatment process for reverse osmosis and ion exchange. These highly advanced hollow fiber membranes can also be used as the polishing step to remove micron size particles and colloids for point-of-use treatment of 18-megohm water. KMS spiral wound RO elements and RO systems reduce the load on ion exchange systems and help protect them from organic fouling.

Typical Reverse Osmosis (RO) System used for High Purity Water Production

Additionally, these membranes are used for the treatment and recycling of wastewater from wafer washing and mechanical grinding operations. This can significantly reduced water usage in a semiconductor chip manufacturing plant and improve the bottom line.

Primary advantages of KMS membranes for microelectronics include:
•  Production of consistent and high quality water regardless of feed water conditions.
•  Consistent, high quality water from the membrane systems leads to improved operation of downstream
   processes.
•  Highly automated operation for minimal operator attention.
•  Minimal chemical use reduces the need to purchase, store and handle chemicals.
•  Minimal waste production and disposal.
•  Potential to treat wastewater from chip manufacturing for reuse. 



KMS High Purity Water Circulating System

There is also an internal high purity recirculation loop to produce make-up water that is used in the manufacturing operation. Using a KMS High Purity Water Circulating System, the water passes through the make-up system and then is circulated in a high purity loop. For example, pharmaceutical manufacturers bring purified water into the loop and maintain its purity throughout the entire the loop sequence.

Any corrosive materials that come off the piping are polished out with Ion Exchange. In some processes, point-of-use filters are used. Typically these are ultrafilters to remove any type of particles that might have come off the piping in the process.

TARGA^® 8 inch Industrial Water Cartridges for larger volume industrial water applications.

TARGA^®-10 10 inch Industrial Water Cartridges
In two high performance sizes:
10 x 48 inches, 10 x 72 inches. Only from KMS for general water treatment applications.
Deliver increased output at lower costs in smaller places.

FLUID SYSTEMS^® NF/RO Elements for dissolved solids and organics removal.
FLUID SYSTEMS^® TFC^® Membrane Elements for dissolved solids removal.
FLUID SYSTEMS^® TFC^® XR(Extreme Rejection)Elements for superior silica removal..

RO Products:
MegaMagnum^® - the world's largest RO element for brackish water treatment and seawater
desalination. Delivers a 40-70% reduction in footprnt per system.

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KMS Membranes of choice for Microelecronics applications:

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